Espacer

• It is used as a film for Electrification Dissipating Material this contains the original conducting polymer.
• The thin film of ESPACER™ has a high conductivity; therefore, it solves the problem about the positional error on the electron-beam (EB) lithography process
• It has an excellent charge dissipating effect with sheet resistance 7 x 105 ohm/sq at 20 nm thickness and conductivity of 0.7 S/cm.
• It has no adverse effect on resolution of resists.
• It can be applied not only onto conventional resists but also onto chemically amplified resists.
• There are cases where it can protect the resist as an acidic polymer film.
• The spun film has sufficient heat resistance in practical uses
• Water alone is used as solvent.
• It has neither a flash point, nor an ignition point, nor flammable limits
• It can be easily removed with water after exposure

	Non Chemical Amplified			Chemical Amplified
	Positive Resist	Positive Resist	Negative Resist	Positive Resist	Negative Resist	Negative Resist
Espacer	ZEP520	PMMA	FOC-1X	FEP-71	SAL601	NEB22
300Z
300HX02
300AX01

Showa Denko Singapore is the sole distributor of ESPACER™ in South East Asia.
MOQ: 100g